[2024-25] 3D Hall effect magnetometer using a positive pyramid structure

Hall-effect sensors are a cornerstone of automotive, industrial, and consumer electronics, holding the largest share of the magnetic sensor market. Recently, our group managed to fabricate a novel type of 3D Hall effect sensor, based on an inverted pyramid structure, and we proved that the device is able to detect the magnetic field’s components with high sensitivity. Now, the objective is to produce a Hall effect device through a positive pyramid structure, comparing its performance to the inverted counterpart. The structure will be realized by means of crystallographic etching of silicon <100> and an active area manufactured on its surface.

Assignment

In this project you will:

1.     Perform a literature review of state-of-the-art Hall devices.

2.     Simulate the device in COMSOL/ Sentaurus/ACES.

3.     Fabricate your design in EKL/Kavli.

4.     Test the Hall effect device.

Requirements

Recommended Background (but not all is required - you can learn in the project!) :

Semiconductor physics

Clean room fabrication

Electrical benchtop testing

Excitement about Magnetic Sensors!

Contact

Last modified: 2024-02-04